Online (automated) microwave plasma system
Online (automated) microwave plasma system
Online (automated) microwave plasma system
Microelectronics and Semiconductor Manufacturing
Pre-packaging treatment: enhances the bonding strength of the chip and the packagingnaterial;
"Wafer dleaning:Remove photoresistresidue, organic contaminants and particles activate and roughen wafer surface, mprove wafer weting properties;
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Project |
Solid state source version |
Magnetron version |
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Output power |
250W×8 |
1.25kW×2 |
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Output frequency |
2400MHz-2500MHz Can adjustable |
2450MHz±25MHz |
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Frequency error |
±50ppm |
1-2% |
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Microwave leaks |
≤2mW/cm2 |
≤2mW/cm2 |
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Cooling method |
Water cooling (1/8 pagoda joint, water flow rate ≥ 2.5L/min, when the inlet water temperature is lower than the ambient temperature, the temperature difference between the two is ≤ 10 °C) |
Water cooling (DN15 pagoda joint, water flow ≥ 2.5L/min, when the inlet water temperature is less than the ambient temperature, the temperature difference between the two is ≤10°C) |
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Process gases |
Ar、O2、H2、CF4 etc |
Ar、O2、H2、CF4etc |
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Plasma treatment area |
0.19m2 |
0.15m2 |
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This is multifunctional small plastic pelletizing line. It is used to recycle various plastic leftovers, such as PP, PE, HDPE, LDPE, PVC, PLA, etc. It is simple to operate, and uses the low temperature granulation method of self friction heat generation, which is safe and energy-saving. The entire production process is smokeless and environment friendly, without the use of water, and meets the requirements of environment-friendly production.
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